Secondary electron emission from multi-layered TiN/Al₂O₃ transmission dynodes

The (secondary) electron emission from multilayered Al$_2$O$_3$/TiN membranes has been investigated with a hemispherical collector system in scanning microscope for electrons energies between 0.3 and 10 keV. These ultra-thin are designed to function as transmission dynodes novel vacuum multipliers. Two different types, bi-layer tri-layer, have manufactured by means of atomic-layer deposition (ALD) aluminum oxide sputtering titanium nitride. reflection yield ($\sigma_R$, $\sigma_T$) measured both types membranes. In comparison, the tri-layer outperformed terms films same effective thickness. highest was on an Al$_2$O$_3$/TiN/Al$_2$O$_3$ film layer thicknesses 5/2.5/5 nm, which had maximum $\sigma_\text{T}^\text{max}(E_0)$ 3.1 (1.55 keV). Furthermore, more in-depth performing additional measurement using positive sample bias separate transmitted fraction $\eta_T$ secondary $\delta_T$. used determine parameter $p$, characterizes interaction primary (PEs) thin films. compare energy transfer PEs thicknesses.